Method and apparatus for detecting surface deviations from a ref

Details Method and apparatus for detecting surface deviations from a ref Method and apparatus for detecting surface deviations from a ref

1992-07-06

1994-05-10

Warden, Robert J.

Optics: measuring and testing

By polarized light examination

With light attenuation

356371, 356373, 356376, 356399, 356400, 356 1, 356 4, 2502013, 2502015, 250561, G01B 1100, G01B 1114, G01C 308, G01C 500

Patent

active

053112881

ABSTRACT:
A method and apparatus for detecting deviation of an examined surface from a reference plane, by: generating first and second beams of radiation, directing the first beam along a first fixed path and focussing it at a first spot on the examined surface, directing the second beam along a second fixed path intersecting the first path at a point in the reference plane and focussing the second beam to a second spot on the examined surface, and detecting the deviation of the centers of the first and second spots with respect to the intersection point in the reference plane to provide an indication of the deviation of the examined surface from the reference plane.

REFERENCES:
patent: 3734626 (1973-05-01), Roberts et al.
patent: 4477185 (1984-10-01), Berger et al.
patent: 4502785 (1985-03-01), Truax
patent: 5076693 (1991-12-01), Teramoto

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