4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Oleh P. Karpenko

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In-situ sequential high density plasma deposition and etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for self-aligned MOS patterning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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