4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By layers which are coated, contacted, or diffused

Okmetic Oyj

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CVD doped structures

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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Gettering method and a wafer using the same

Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
Reexamination Certificate

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