Stacked lens structure and method of use thereof for...

Details Stacked lens structure and method of use thereof for... Stacked lens structure and method of use thereof for...

2006-05-16

2006-05-16

Nguyen, Kiet T. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

Reexamination Certificate

active

07045794

ABSTRACT:
A micro-electrical system, such as a lens stack for use in a scanning electron microscope, analysis tool, etc., comprises recesses and/or serrations that increase the surface path breakdown, thereby increasing reliability and enabling high voltage operations.

REFERENCES:
patent: 4200794 (1980-04-01), Newberry et al.
patent: 5122663 (1992-06-01), Chang et al.
patent: 5155412 (1992-10-01), Chang et al.
patent: 6288401 (2001-09-01), Chang et al.
patent: 6946662 (2005-09-01), Ono et al.
patent: 6956219 (2005-10-01), Saini et al.
L.P. Muray et al., “Advances in Arrayed Microcolumn Lithography,”J. Vac. Sci. Technol. B, Nov./Dec. 2000, pp. 3099-3104, vol. 18, No. 6, American Vacuum Society, New York, U.S.A.
T.H.P. Chang et al., “Multiple Electron-Beam Lithography,”Microelectronic Engineering, 2001, pp. 117-135, vol. 57-58.

Affiliated with

Also associated with

Rating

Stacked lens structure and method of use thereof for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stacked lens structure and method of use thereof for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stacked lens structure and method of use thereof for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3554103