4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Novellus Systems

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Deposition reactor with precursor recycle

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor
Reexamination Certificate

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Gas-based backside protection during substrate processing

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Process for depositing F-doped silica glass in high aspect...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Wafer heating using edge-on illumination

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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