4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Nova Associates, Inc.

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Treating workpieces with beams

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Vacuum chamber for treating workpieces with beams

Radiant energy – With charged particle beam deflection or focussing – With target means
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Wafer loading apparatus for beam treatment

Radiant energy – Luminophor irradiation
Patent

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