4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Chemical vapor deposition

Noriyuki Hirata

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Apparatus using positional data detected in a non-contact...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Dry etching method of thin film

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method and apparatus using positional data detected in a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method for accurate suction/removal detection and suction/transf

Measuring and testing – With fluid pressure – Dimension – shape – or size
Patent

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Method for formation of thin film

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-120518

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