Measuring and testing – With fluid pressure – Dimension – shape – or size
Patent
1987-11-27
1989-07-25
Levy, Stewart J.
Measuring and testing
With fluid pressure
Dimension, shape, or size
G01B 1300
Patent
active
048502162
ABSTRACT:
A suction detector which can accurately detect suction and removal of an object to be chucked, includes: a pressure sensor for detecting the pressure in a suction path for chucking the object and for generating pressure data corresponding to the detected pressure; a delaying circuit for delaying transmission of the pressure data from the pressure sensor and for generating delayed pressure data; and a suction/removal detecting unit for comparing first total data of the delayed pressure data from the delaying circuit and adjustably-set first level difference data with the pressure data from the pressure sensor, to detect suction of the object, and for comparing second total data of the pressure data from the pressure sensor and adjustably-set second level difference data with the delayed pressure data from the delaying circuit, to detect removal of the object. The delaying circuit comprises an integrating circuit which includes a resistor and a capacitor, and removes spike noise.
REFERENCES:
patent: 3674140 (1972-07-01), File
patent: 4510683 (1985-04-01), Fedde et al.
patent: 4683654 (1987-08-01), Scholten et al.
Hirata Noriyuki
Motokawa Shigeyuki
Tamai Kouichi
Kabushiki Kaisha Toshiba
Levy Stewart J.
Roskos Joseph W.
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