4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Noriyuki Anai

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Apparatus for coating resist on substrate

Coating apparatus – With means to centrifuge work
Patent

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Apparatus for manufacturing a semiconductor for a liquid crystal

Machines not elsewhere specified – Miscellaneous
Patent

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Apparatus for manufacturing a semiconductor for a liquid crystal

Machines not elsewhere specified – Miscellaneous
Patent

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Apparatus for removing coated film from peripheral portion of su

Cleaning and liquid contact with solids – Apparatus – With movably or flexibly mounted spray or jet applying...
Patent

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Coating and developing apparatus

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Profile ID: LFUS-PAI-P-271402

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