Cleaning and liquid contact with solids – Apparatus – With movably or flexibly mounted spray or jet applying...
Patent
1998-07-30
2000-06-27
Dang, Thi
Cleaning and liquid contact with solids
Apparatus
With movably or flexibly mounted spray or jet applying...
134144, 134902, 156345, B08B 300
Patent
active
060794283
ABSTRACT:
Disclosed is an apparatus for removing a coated film from a peripheral portion of a substrate, comprising a section for holding a rectangular substrate horizontal, a surrounding member for surrounding a peripheral portion of the substrate held by the holding section, a discharge section mounted to face an upper peripheral portion of the substrate held by the holding section, rotatable about its longitudinal axis, a supply mechanism for supplying a solvent capable of dissolving the coated film into the solvent discharge section, a discharge rate controller for controlling the discharge rate of the solvent from the discharge section, a rotating mechanism for rotating the discharge section about its longitudinal axis between a first position in which the discharge port faces perpendicularly downward the front surface of the substrate and a second position, a suction mechanism, and control means for controlling the operation of each of the controller and the rotating mechanism.
REFERENCES:
patent: 5718763 (1998-02-01), Tateyama et al.
patent: 5853803 (1998-12-01), Tateyama et al.
patent: 5993552 (1999-11-01), Tsukamoto et al.
Dang Thi
Tokyo Electron Limited
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