4. Coating apparatus
  5. Gas or vapor deposition

Nitin Ingle

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Gas distribution showerhead

Coating apparatus – Gas or vapor deposition
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Gas flow control in a wafer processing system having...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With etchant gas supply or exhaust structure located outside...
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Integration sequences with top surface profile modification

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Profile ID: LFUS-PAI-P-2687386

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