4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Nirmal Chaudhary

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Dry process for cleaning residues/polymers after metal etch

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Electronic circuit, electronic circuit arrangement and...

Electricity: electrical systems and devices – Safety and protection of systems and devices – Load shunting by fault responsive means
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Gate electrode for FinFET device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low temperature carbon rich oxy-nitride for improved RIE...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Methods for performing planarization and recess etches and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2040672

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