4. Electric heating
  5. Metal heating
  6. By arc

Niles K. MacDonald

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Apparatus and method for detecting an endpoint in a vapor...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Apparatus and method for flow of process gas in an...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Resonant impedance-matching slow-wave ring structure...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Structural modification using electron beam activated...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2048301

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