4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Nicholas J Tobergte

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Method for fabricating a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for manufacturing semiconductor device having metal...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of eliminating source/drain junction spiking, and...

Semiconductor device manufacturing: process – Forming schottky junction – Using platinum group metal
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