4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Nicholas E. Miller

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition process

Coating processes – Coating by vapor – gas – or smoke
Patent

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Primary flow CVD apparatus comprising gas preheater and means fo

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Refractory metal deposition process

Coating processes – Electrical product produced – Metal coating
Patent

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Profile ID: LFUS-PAI-P-779614

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