4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Neuralsystems Corporation

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Apparatus for forming single-crystalline thin film by beam irrad

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus for forming single-crystalline thin film by beam irrad

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method of and apparatus for forming single-crystalline thin film

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Patent

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Method of forming single-crystalline thin film by beam irradiato

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent

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