Coating apparatus – Gas or vapor deposition – With treating means
Patent
1997-03-19
2000-03-07
Kunemund, Robert
Coating apparatus
Gas or vapor deposition
With treating means
118723EB, 118723EF, 118723FI, C23C 1600
Patent
active
060326115
ABSTRACT:
In order to form a single-crystalline thin film on a polycrystalline substrate using plasma CVD, a downwardly directed mainly neutral Ne atom current is formed by an ECR ion generator (2). A reaction gas such as silane gas which is supplied from a reaction gas inlet pipe (13) is sprayed onto an SiO.sub.2 substrate (11) by an action of the Ne atom current, so that an amorphous Si thin film is grown on the substrate (11) by a plasma CVD reaction. At the same time, a part of the Ne atom current having high directivity is directly incident upon the substrate (11), while another part thereof is incident upon the substrate (11) after its course is bent by a reflector (12). The reflector (12) is so set that all directions of the parts of the Ne atom current which are incident upon the substrate (11) are perpendicular to densest planes of single-crystalline Si. Therefore, the as-grown amorphous Si is sequentially converted to a single-crystalline Si thin film having crystal axes which are so regulated that the densest planes are oriented perpendicularly to the respective directions of incidence, by an action of the law of Bravais. Thus, a single-crystalline thin film is formed on a polycrystalline substrate.
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Asakawa Toshifumi
Shindo Masahiro
Ueyama Sumiyoshi
Yoshimizu Toshikazu
Kunemund Robert
Mega Chips Corporation
Neuralsystems Corporation
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