4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Neal P. Callan

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Chromeless phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Maskless vortex phase shift optical direct write lithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Process and apparatus for achieving single exposure pattern...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Process and apparatus for achieving single exposure pattern...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Process and apparatus for generating a strong phase shift...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2362369

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