4. Coating apparatus
  5. Work holders, or handling devices

Naoyuki Nozawa

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Substrate holder

Coating apparatus – Work holders – or handling devices
Patent

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Substrate holder

Coating apparatus – Gas or vapor deposition – With treating means
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Substrate holder for reducing non-uniform film characteristics r

Coating apparatus – Work holders – or handling devices
Patent

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Substrate support mechanism and substrate rotation device

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-899258

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