Substrate holder

Details Substrate holder Substrate holder

1998-07-27

2000-02-29

Bueker, Richard

Coating apparatus

Work holders, or handling devices

118728, B05C 1300

Patent

active

060304553

ABSTRACT:
A substrate holder for holding a circular substrate in a vertical position during processing of the substrate. The substrate holder is provided with a vertical base plate and three support claws which are mounted on the base plate and which hold the peripheral edge of a substrate. One of the three support claws is a fixed support claw which holds the edge of the substrate at the bottom to support and whose position does not change when the weight of the substrate is supported. The other two support claws are moveable and may be actuated to hold the edge of the substrate at its sides to restrain motion of the substrate. The moveable support claws can be opened and closed for substrate mounting and removal. The two movable support claws are installed on the base plate in a manner so that when the substrate is supported by the fixed support claw they contact the side edge at locations which are higher than the height of the center of the substrate.

REFERENCES:
patent: 4595481 (1986-06-01), Allen et al.
patent: 4634512 (1987-01-01), Allen et al.
patent: 4735540 (1988-04-01), Allen et al.
patent: 4735701 (1988-04-01), Allen et al.
patent: 5089110 (1992-02-01), Allen et al.
patent: 5296118 (1994-03-01), Allen et al.
patent: 5543022 (1996-08-01), Nguyen et al.

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