4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Methods

Naokatsu Ikegami

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Acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Method for forming contact hole by dry etching

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method for manufacturing a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for manufacturing sidewall spacers of a semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Profile ID: LFUS-PAI-P-325802

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