Acceleration sensor

Details Acceleration sensor Acceleration sensor

2006-02-28

2006-02-28

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514010

Reexamination Certificate

active

07004030

ABSTRACT:
An acceleration sensor capable of standing a great acceleration is to be provided. It is configured of a mounting board and a sensor chip in which the sensor chip is formed of a weight, a beam and a frame. Then, the weight is surrounded by the frame. The weight is joined to the frame by a plurality of the beams, and the weight is separated from the board by being supported by the beams. Additionally, a thin, rectangular stopper is disposed on the mounting board right under the weight.

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