4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Nam-Hun Kim

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Construction of built-up structures on the surface of...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method for etching a trench having rounded top and bottom...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma etching of polysilicon using fluorinated gas mixtures

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma etching of silicon using fluorinated gas mixtures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Storage poly process without carbon contamination

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2078856

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