4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Nai-Han Cheng

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Junction profile engineering using staged thermal annealing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Shallow junction formation and high dopant activation rate...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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