4. Optics: measuring and testing
  5. By polarized light examination
  6. Of surface reflection

Nadine Blayo

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Measurement and control of linewidths in periodic structures usi

Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent

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Process for fabricating a device using an ellipsometric techniqu

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
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Profile ID: LFUS-PAI-P-863233

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