4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Mutumi Tuda

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Magnetically enhanced microwave plasma generating apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Method of manufacturing semiconductor device

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Plasma generating apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Plasma generating apparatus with multiple microwave introducing

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Plasma processing apparatus capable of evaluating process...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1155052

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