4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Mohd Fadzli Anwar Hassan

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Aluminum contact integration on cobalt silicide junction

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Deposition processes for titanium nitride barrier and aluminum

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2190014

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