4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Mizunori Ezaki

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Exposure mask, exposure mask manufacturing method, and...

X-ray or gamma ray systems or devices – Specific application – Lithography
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Method of etching an object, method of repairing pattern,...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Having diverse electrical device
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Method of etching an object, method of repairing pattern,...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Optical waveguide circuit and multi-core central processing...

Optical waveguides – Integrated optical circuit
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Semiconductor surface light-emitting device

Coherent light generators – Particular resonant cavity – Distributed feedback
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Profile ID: LFUS-PAI-P-2432214

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