4. Coherent light generators
  5. Particular temperature control
  6. Liquid coolant

Mitsugu Terada

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Discharge exciting excimer laser device

Coherent light generators – Particular pumping means – Electrical
Patent

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Gas laser apparatus

Coherent light generators – Particular active media – Gas
Patent

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Laser device

Coherent light generators – Particular beam control device – Tuning
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Laser output unit

Coherent light generators – Particular active media – Gas
Patent

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Laser wavelength measuring device

Optics: measuring and testing – By particle light scattering – With photocell detection
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Profile ID: LFUS-PAI-P-756194

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