Coherent light generators – Particular pumping means – Electrical
Patent
1991-11-04
1993-10-05
Davie, James W.
Coherent light generators
Particular pumping means
Electrical
372 57, 372 86, H01S 3097
Patent
active
052512266
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a discharge exciting laser device comprising a pair of main discharge electrodes and an auxiliary electrode.
BACKGROUND TECHNIQUE
The conventional technique of this kind is disclosed in Japanese Patent Laid-Open publication No. 91982/1986. This Japanese Patent Laid-Open publication NO. 91982 discloses a discharge exciting excimer laser device in which for extending the life of laser gas, alumina ceramics inert to laser gas is used in place of quartz heretofore used to constitute a dielectric.
In the discharge exciting excimer laser device of this kind, it is necessary for increasing a laser output to activate preliminary ionization, when auxiliary discharge takes place between a main discharge electrode and an auxiliary discharge electrode, that is, photo ionization effect caused by ultraviolet luminescence from the auxiliary electrode and the supply of electron to a main discharge space.
To this end, it was necessary (1) to quicken a rise of voltage between the main discharge electrode and the auxiliary discharge electrode, (2) to increase a dielectric constant of an dielectric, (3) to reduce the sectional thickness of the dielectric, and (4) to improve a contact between the dielectric and the electrode. In addition, there was a technical problem of improving the insulating performance between the electrodes.
However, in the conventional techniques including the aforesaid publication, sufficient consideration has not been paid to the aforesaid points. Particularly, the shape of the dielectric in the aforesaid points (3) and (4) has been ignored.
More particularly, in the prior art, the dielectric to surround the auxiliary electrode was in the shape of cylinder (a round pipe) or flat plate, and the inner surface thereof in contact with the auxiliary electrode was curved, there were difficulties in that polishing work is difficult, and the operation for receiving the auxiliary electrode therein is cumbersome.
When a high voltage of the order of 30 kv was applied in order to obtain a high output, a dielectric breakdown possibly occurs in the dielectric construction having the aforementioned shape.
On the other hand, Japanese Patent Publication No. 64069/1988 discloses a discharge exciting pulse laser in which a dielectric in the form of a tube is used and a cooling medium is sealed into the tubular dielectric. The feature of this patent publication lies in that a dielectric is formed into a tubular configuration, into which is sealed a cooling medium, and nothing is described of the fact that a dielectric should be formed into a square pipe.
DISCLOSURE OF THE INVENTION
The present invention has employed the following means to increase the laser output and improve the insulating performance.
The present invention provides a discharge exciting excimer laser device comprising a pair of main discharge electrodes with a laser optical axis being in a longitudinal direction, said main discharge electrodes being arranged opposedly to each other over said laser optical axis, a dielectric arranged externally of said pair of main discharge electrodes and opposedly to one of said main discharge electrodes, and an auxiliary electrode opposed to said one of main discharge electrodes through said dielectric, said dielectric being formed into a cylindrical configuration and whose side opposed to the main discharge electrodes is in the form of a flat plate, said auxiliary electrode being embraced within the dielectric leaving a space and being opposed to said one of main discharge electrodes with said flat plate portion sandwiched therebetween.
According to the aforementioned means, said dielectric is formed into a cylindrical configuration and the side thereof opposed to the main discharge electrodes being in the form of a flat plate, and said auxiliary electrode is embraced within the dielectric leaving a space and opposed to one of the main discharge electrodes with said flat plate portion sandwiched therebetween. With this arrangement, the insulating performance can
REFERENCES:
patent: 4837773 (1989-06-01), Wakata et al.
Oeda Yasuo
Ohmata Ken
Shibata Hideaki
Terada Mitsugu
Terashi Yuichiro
Davie James W.
Mitsui Petrochemical Industries Ltd.
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