4. Material or article handling
  5. Apparatus for moving material between zones having different...
  6. For carrying standarized mechanical interface type

Mitchell A. Drew

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Batchloader for load lock

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Batchloader for substrate carrier on load lock

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
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Cluster tool batchloader of substrate carrier

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Profile ID: LFUS-PAI-P-147680

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