4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Microfabrica Inc.

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Cantilever microprobes for contacting electronic components...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Cantilever microprobes for contacting electronic components...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Complex microdevices and apparatus and methods for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Complex microdevices and apparatus and methods for...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Complex microdevices and apparatus and methods for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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