Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2007-03-06
2007-03-06
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514320
Reexamination Certificate
active
10313795
ABSTRACT:
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™)
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Bang Christopher A.
Cohen Adam L.
Evans John D.
Lockard Michael S.
Kwok Helen
Microfabrica Inc.
Smalley Dennis R.
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