4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Michael Whitley

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Method of making multilevel MEMS structures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Miniature thermoacoustic cooler

Refrigeration – Gas compression – heat regeneration and expansion – e.g.,...
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Profile ID: LFUS-PAI-P-2822824

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