Miniature thermoacoustic cooler

Refrigeration – Gas compression – heat regeneration and expansion – e.g.,...

Reexamination Certificate

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Reexamination Certificate

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07017351

ABSTRACT:
A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The cryogenic cooling system can be integrated directly into a cryogenic electronic device. A vertical comb-drive provides an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.

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Hao, Zhili et al. “A Miniature Thermoacoustic Cryo-cooler Driven by a Vertical Comb-Drive.” Proceedings of SPIE, vol. 4983 (2003), pp. 139-148.

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