4. Heating
  5. Work feeding, agitating, discharging or conveying...
  6. Outside conveyor track paralleled by chamber wall slot for...

Michael W. Richter

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Closed loop control over delivery of liquid material to...

Dispensing – Processes of dispensing
Reexamination Certificate

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Closed loop control over delivery of liquid material to...

Dispensing – Automatic control – By the weight of the material in the supply container
Reexamination Certificate

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Gas flow control in a substrate processing system

Drying and gas or vapor contact with solids – Apparatus – Vacuum
Patent

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Method of controlling gas flow in a substrate processing system

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure varies during treatment
Reexamination Certificate

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Multi-function chamber for a substrate processing system

Heating – Work feeding – agitating – discharging or conveying... – Outside conveyor track paralleled by chamber wall slot for...
Patent

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Profile ID: LFUS-PAI-P-765874

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