4. Coating apparatus
  5. Gas or vapor deposition

Michael Sklyar

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Baffled liner cover

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Detachable edge ring for thermal processing support towers

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3242004

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