Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
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Directed reagents to improve material uniformity
Gas driven planetary rotation apparatus and methods for...
Growth of very uniform silicon carbide epitaxial layers
Highly uniform silicon carbide epitaxial layers
Induction heating devices and methods for controllably...
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Profile ID: LFUS-PAI-P-446107