System for measuring the position of a wafer in a cassette

Details System for measuring the position of a wafer in a cassette System for measuring the position of a wafer in a cassette

1986-04-17

1987-12-15

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250223R, G01N 2186

Patent

active

047135514

ABSTRACT:
In order to compensate for worn or distorted wafer cassettes and missing wafers, the cassette of wafers is scanned through a beam. The timing of the interruptions of the beam is used to inventory the wafers present and measure the exact position of each wafer relative to the base of the cassette.

REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4437660 (1984-03-01), Tompkins et al.

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