4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Michael D. Welch

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Adjusting DC bias voltage in plasma chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Adjusting DC bias voltage in plasma chamber

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Apparatus and method for detecting a presence or position of...

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to attribute – absence or presence of work
Reexamination Certificate

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Configurable single substrate wet-dry integrated cluster...

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Double slit-valve doors for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-792543

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