4. Pumps
  5. Motor driven
  6. Electric or magnetic motor

Michael B. Petach

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Droplet and filament target stabilizer for EUV source nozzles

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Electric motor with vibration attenuation

Electrical generator or motor structure – Dynamoelectric – Rotary
Reexamination Certificate

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Erosion reduction for EUV laser produced plasma target sources

X-ray or gamma ray systems or devices – Source
Reexamination Certificate

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Gasdynamically-controlled droplets as the target in a...

X-ray or gamma ray systems or devices – Source
Reexamination Certificate

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Gear pump with noise attenuation

Rotary expansible chamber devices – Combined
Patent

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Profile ID: LFUS-PAI-P-383524

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