Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-03-08
2005-03-08
Lee, John R. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S119000
Reexamination Certificate
active
06864497
ABSTRACT:
An EUV radiation source that creates a stable solid target filament. The source includes a nozzle assembly having a condenser chamber for cryogenically cooling a gaseous target material into a liquid state. The liquid target material is forced through an orifice of a target filament generator into an evaporation chamber as a liquid target stream. The evaporation chamber has a higher pressure than a vacuum process chamber of the source to allow the liquid target material to freeze into a target filament in a stable manner. The frozen target filament is emitted from the evaporation chamber into the process chamber as a stable target filament towards a target area. The higher pressure in the evaporation chamber can be the result of the evaporative cooling of the target material alone or in combination with a supplemental gas.
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McGregor Roy D.
Orsini Rocco A.
Petach Michael B.
Gurzo Paul M.
Lee John R.
Miller Joan A.
University of Central Florida Research Foundation
Warn, Hoffmann, Miller & LaLone, P.C.
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