4. Movable or removable closures
  5. Miscellaneous

Michael Adrianus Theodorus Hompus

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Apparatus for performing at least one process on a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Lock for vacuum chamber

Movable or removable closures – Miscellaneous
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Method for passivating a semiconductor substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-2633569

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