4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Michael A. Guerra

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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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System and method for unipolar magnetic scanning of heavy ion be

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Profile ID: LFUS-PAI-P-950491

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