Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1994-06-10
1995-08-01
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250398, 25049221, H01J 37141
Patent
active
054382033
ABSTRACT:
A magnetic deflection system for scanning an ion beam over a selected surface comprising: a magnetic structure having poles with respective scanning coils and respective pole faces that define therebetween a gap through which the ion beam passes; a primary current source coupled to the scanning coils adapted to apply to the scanning coils an excitation current to generate a substantially unipolar oscillatory magnetic field in the gap that alternates in polarity as a function of time to cause scanning of the ion beam, the substantially unipolar magnetic field having a magnitude sufficiently greater than zero to prevent the transverse cross-section of the ion beam from substantially fluctuating in size while the ion beam is being scanned across the selected surface.
REFERENCES:
patent: 2053537 (1936-09-01), Schlesinger
patent: 2108091 (1938-02-01), Von Ardenne
patent: 2260725 (1941-10-01), Richards et al.
patent: 3193717 (1965-07-01), Nunan
patent: 3569757 (1971-03-01), Brewer et al.
patent: 3911321 (1975-10-01), Wardly
patent: 4063098 (1977-12-01), Enge
patent: 4260897 (1981-04-01), Bakker et al.
patent: 4276477 (1981-06-01), Enge
patent: 4367411 (1983-01-01), Hanley et al.
patent: 4469948 (1984-09-01), Veneklasen et al.
patent: 4687936 (1987-08-01), McIntyre et al.
patent: 4745281 (1988-05-01), Enge
patent: 4804852 (1989-02-01), Rose et al.
patent: 4806766 (1989-02-01), Chisholm
patent: 5012104 (1991-04-01), Young
patent: 5053627 (1991-10-01), Ruffell et al.
patent: 5132544 (1992-07-01), Glavish
patent: 5311028 (1994-05-01), Glavish
H. F. Glavish et al., "Fast Magnetic Scanning and Ion Optical Features of the New Ibis Oxygen Implanter," Nucl. Instr. & Methods, vol. B74, pp. 397-400 (1993).
Glavish Hilton F.
Guerra Michael A.
Kawai Tadashi
Nagai Nobuo
Naito Masao
Berman Jack I.
Beyer James
Nissin Electric Company
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