4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. With measuring, testing, or inspecting

Mehran Naser-Ghodsi

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Method and apparatus for endpoint detection in electron beam...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Structural modification using electron beam activated...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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