4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Matthias Fuertsch

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Device for detecting a deformation of a component

Motor vehicles – With means for promoting safety of vehicle – its occupant or... – Responsive to engagement of portion of perimeter of vehicle...
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Mass flow sensor

Measuring and testing – Volume or rate of flow – Thermal type
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Membrane sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Method for fabricating micromechanical components

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Micromechanical mass flow sensor and method for the...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Profile ID: LFUS-PAI-P-2014702

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