Method to generate airgaps with a template first scheme and...

Details Method to generate airgaps with a template first scheme and... Method to generate airgaps with a template first scheme and...

2011-01-04

2011-01-04

Stark, Jarrett J (Department: 2823)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having air-gap dielectric

C257SE21564, C257SE21573, C257SE21581

Reexamination Certificate

active

07863150

ABSTRACT:
A structure and method to produce an airgap on a substrate having a dielectric layer with a pattern transferred onto the dielectric layer and a self aligned block out mask transferred on the dielectric layer around the pattern.

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