4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Masayoshi Yajima

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Manufacturing apparatus for semiconductor device and...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Manufacturing method for semiconductor device and...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2297448

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