4. Coating apparatus
  5. With means to centrifuge work

Masatoshi Deguchi

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Apparatus and method for applying process solution

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Apparatus and method for applying process solution

Coating processes – Measuring – testing – or indicating
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Coating apparatus and method

Coating processes – Centrifugal force utilized
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Method for heat processing of substrate

Coating processes – Centrifugal force utilized
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Method of forming coating film and apparatus therefor

Coating processes – Centrifugal force utilized
Patent

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